Real-time monitoring of structural vibration using spectral-domain optical coherence tomography

摘要

We report in this paper the development of a spectral-domain optical coherence vibration tomography (OCVT) using a broadband CCD-based spectrometer and a short-coherence white light source. We demonstrate that both the vibration amplitude and frequency can be quantified, in the frequency range 0–250 Hz, with an axial resolution of 1 μm. Furthermore, the inner structure (layer thickness) of a vibrating sample can also be quantified simultaneously. The developed OCVT is non-contact and noninvasive in nature, thus is ideal for real time and in situ monitoring of low-frequency micro-vibrations that have critical impacts on many high-precision manufacturing and engineering processes.